Characterization of position and two-dimensional profiles of high-density beam spot array for digital lithography system

2020 ◽  
Author(s):  
Yunhyeok Ko ◽  
Changmin Lee ◽  
Jae Hahn
Keyword(s):  
High Density ◽  
Two Dimensional ◽  
Beam Spot ◽  
Lithography System ◽  
Spot Array

Characterization of compounds in crude oils by gas purge micro-syringe extraction coupled to comprehensive two-dimensional gas chromatography

2014 ◽  
Vol 32 (10) ◽  
pp. 1144
Author(s):  
Ting TONG ◽  
Wanfeng ZHANG ◽  
Donghao LI ◽  
Jinhua ZHAO ◽  
Zhenyang CHANG ◽  
...  
Keyword(s):  
Gas Chromatography ◽  
Crude Oils ◽  
Two Dimensional ◽  
Gas Purge

scholarly journals Terahertz characterization of two-dimensional low-conductive layers enabled by metal gratings

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Prashanth Gopalan ◽  
Yunshan Wang ◽  
Berardi Sensale-Rodriguez
Keyword(s):  
Optical Transmission ◽  
Terahertz Spectroscopy ◽  
Design Guidelines ◽  
Two Dimensional ◽  
Highly Sensitive ◽  
Transmission Measurements ◽  
Metal Gratings ◽  
Low Sensitivity ◽  
Non Destructive

AbstractWhile terahertz spectroscopy can provide valuable information regarding the charge transport properties in semiconductors, its application for the characterization of low-conductive two-dimensional layers, i.e., σs <  < 1 mS, remains elusive. This is primarily due to the low sensitivity of direct transmission measurements to such small sheet conductivity levels. In this work, we discuss harnessing the extraordinary optical transmission through gratings consisting of metallic stripes to characterize such low-conductive two-dimensional layers. We analyze the geometric tradeoffs in these structures and provide physical insights, ultimately leading to general design guidelines for experiments enabling non-contact, non-destructive, highly sensitive characterization of such layers.

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