New frontiers in imaging at DARPA Microsystems Technology Office (Conference Presentation)

Author(s):  
Whitney Mason
Author(s):  
P. I. Didyk ◽  
◽  
A. A. Zhukov ◽  
◽  

1999 ◽  
Vol 4 (2) ◽  
pp. 35-39
Author(s):  
Bill Stockdale

Subject material presented describes substrate materials and their processing as key elements in microsystems technology manufacturing (MST) for Biochips (DNA arrays), Electronic MEMS (Micro-Electro-Mechanical) Devices and electro-optics. Material choices are primarily glass, quartz and silicon, each of which may require mechanical features and exact surface finishes to enable design function and manufacturing. This paper will address some basic approaches to determining what substrates require for specific designs and manufacturing processes.


Micromachines ◽  
2020 ◽  
Vol 11 (4) ◽  
pp. 369 ◽  
Author(s):  
Yu-suke Torisawa ◽  
Yi-Chung Tung

Recent advances in microsystems technology and cell culture techniques have led to the development of organ-on-chip microdevices to model functional units of organs [...]


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