Scanning wavefront detection coherent Fourier scatterometry

Author(s):  
Jörg Bischoff ◽  
Rostyslav Mastylo ◽  
Eberhard Manske
Keyword(s):  
2014 ◽  
Vol 7 (6) ◽  
pp. 1003-1011
Author(s):  
汤兆鑫 TANG Zhao-xin ◽  
黄玮 HUANG Wei ◽  
许伟才 XU Wei-cai ◽  
刘立峰 LIU Li-feng ◽  
徐象如 XU Xiang-ru
Keyword(s):  

2019 ◽  
Vol 114 (18) ◽  
pp. 183103
Author(s):  
Charles Pelzman ◽  
Sang-Yeon Cho
Keyword(s):  

2018 ◽  
Vol 124 (4) ◽  
Author(s):  
Jianhui Huang ◽  
Huiliang Jin ◽  
Qian Ye ◽  
Guoxiang Meng

2021 ◽  
pp. 1-1
Author(s):  
Xu Yan ◽  
Changqing Cao ◽  
Wenrui Zhang ◽  
Xiaodong Zeng ◽  
Zhejun Feng ◽  
...  

2010 ◽  
Vol 30 (9) ◽  
pp. 2590-2595
Author(s):  
李遥 Li Yao ◽  
白剑 Bai Jian ◽  
邓燕 Deng Yan ◽  
许乔 Xu Qiao ◽  
杨国光 Yang Guoguang

Sign in / Sign up

Export Citation Format

Share Document