Enhancing the reactivity of polymerizable antimony carboxylate EUV photoresists (Conference Presentation)

Advances in Patterning Materials and Processes XXXVII ◽

10.1117/12.2553529 ◽

2020 ◽

Author(s):

Michael Murphy ◽

James Passarelli ◽

Maximilian Weires ◽

Jodi Grzeskowiak ◽

Robert L. Brainard

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