All new nickel based Metal Core Organic Cluster (MCOC) resist for N7+ node patterning
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2001 ◽
Vol 66
(7)
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pp. 1062-1077
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2009 ◽
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2021 ◽
Vol 1098
(4)
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pp. 042059
2005 ◽
Vol 38
(19)
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pp. 3733-3740
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1988 ◽
Vol 345
(1-2)
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pp. 177-186
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