Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
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1998 ◽
Vol 14
(4)
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pp. 883-903
2002 ◽
Vol 7
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pp. 31-42
2016 ◽
Vol 126
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pp. 883-905
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1988 ◽
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pp. 237-263
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2014 ◽
Vol 445
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pp. 256-269
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2012 ◽
Vol 44
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pp. 603-616
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2015 ◽
Vol 83
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