AFM characterization for Gate-All-Around (GAA) devices

Metrology, Inspection, and Process Control for Microlithography XXXIV ◽

10.1117/12.2551931 ◽

2020 ◽

Author(s):

Mary A. Breton ◽

Jennifer Fullam ◽

Lan Yu ◽

Dexin Kong ◽

Daniel Schmidt ◽

...

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