Diffraction compensation of slope errors on strongly curved grating substrates

Advances in Metrology for X-Ray and EUV Optics VIII ◽

10.1117/12.2550336 ◽

2019 ◽

Author(s):

Christoph Braig ◽

Jürgen Probst ◽

Enrico Langlotz ◽

Ilko Rahneberg ◽

Michael Kühnel ◽

...

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