ArF*, KrF*, and FI lasers pumped by double discharge from generator with semiconductor opening switch
2012 ◽
Vol 36
(1)
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pp. 143-193
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Keyword(s):
1972 ◽
Vol 43
(4)
◽
pp. 662-666
◽
1987 ◽
Vol 15
(6)
◽
pp. 667-673
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