Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor

2019 ◽  
Author(s):  
Pei Lu ◽  
Xiaoyong Liu ◽  
Qin Shi ◽  
Jianxin Shao ◽  
Yongcai Zhang ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Image Sensor ◽  
Partial Coherence ◽  
Laser Lithography ◽  
Illumination System ◽  
Ccd Image Sensor ◽  
Ccd Image ◽  
Coherence Measurement

Investigation of SEE Breakdown in CCD Image Sensor

2018 ◽  
Author(s):  
Maksim E. Cherniak ◽  
Roman K. Mozhaev ◽  
Alexander A. Pechenkin ◽  
Dmitry V. Boychenko ◽  
Alexander Y. Nikiforov
Keyword(s):  
Image Sensor ◽  
Ccd Image Sensor ◽  
Ccd Image

scholarly journals Design of a hardware/software FPGA-based driver system for a large area high resolution CCD image sensor

2014 ◽  
Vol 4 (3) ◽  
pp. 274-280 ◽  
Author(s):  
Ying Chen ◽  
Wanpeng Xu ◽  
Rongsheng Zhao ◽  
Xiangning Chen
Keyword(s):  
High Resolution ◽  
Image Sensor ◽  
Large Area ◽  
Ccd Image Sensor ◽  
Ccd Image

A 2/3 inch 400 k pixel sticking-free stack-CCD image sensor

1993 ◽  
Author(s):  
M. Sasaki ◽  
Y. Koya ◽  
H. Yamashita ◽  
S. Ohsawa ◽  
R. Miyagawa ◽  
...  
Keyword(s):  
Image Sensor ◽  
Ccd Image Sensor ◽  
Ccd Image

Large-format 1280 x 1024 full-frame CCD image sensor with a lateral-overflow drain and transparent gate electrode

1991 ◽  
Author(s):  
Eric G. Stevens ◽  
Stephen L. Kosman ◽  
John C. Cassidy ◽  
Winchyi Chang ◽  
Wesley A. Miller
Keyword(s):  
Image Sensor ◽  
Gate Electrode ◽  
Large Format ◽  
Ccd Image Sensor ◽  
Ccd Image

A 1280 × 980 pixel CCD image sensor

2005 ◽  
Author(s):  
I. Akiyama ◽  
T. Tanaka ◽  
E. Oda ◽  
T. Kamata ◽  
K. Masubuchi ◽  
...  
Keyword(s):  
Image Sensor ◽  
Ccd Image Sensor ◽  
Ccd Image
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