High LIDT photosensitive organic-inorganic hybrid materials for nanoimprint lithography (Conference Presentation)
2006 ◽
Vol 19
(3)
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pp. 397-402
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2015 ◽
Vol 16
(12)
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pp. 1070-1077
Keyword(s):
2019 ◽
Vol 1
(6)
◽
pp. 1514-1523
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Keyword(s):
Direct imprinting of organic–inorganic hybrid materials into high aspect ratio sub-100 nm structures
2013 ◽
Vol 20
(10-11)
◽
pp. 1961-1966
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