Ultra-precision machining technology is adapt to the development of modern technology a new technology of mechanical processing, the new achievement of the development of the integrated application of the mechanical technology and modern electronic technology, measurement technology and computer technology in advanced control, testing method, etc., makes a further improve the precision of machining. At present the increasing maturity of the ultra precision machining, has formed a series, it include ultra precision cutting, super precision grinding and super precision grinding and super precision special processing, etc. Ultra-precision machining to high precision, high efficiency, large-scale, miniaturization, intelligent, process integration, the integration of online processing detection, such as green direction.