Laser-induced backside wet/dry etching microstructures on transparent and brittle materials
1974 ◽
Vol 32
◽
pp. 472-473
2000 ◽
Vol 10
(PR9)
◽
pp. Pr9-811-Pr9-816
◽
2016 ◽
Vol 14
(3)
◽
pp. 273-290
◽
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