On the characterization of ultra-precise XUV-focusing mirrors by means of high angular resolution slope-measuring deflectometry
2015 ◽
2015 ◽
Vol 650
◽
pp. 012016
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2002 ◽
Vol 47
(6)
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pp. 1083-1099
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Keyword(s):
2012 ◽
Vol 23
(7)
◽
pp. 074015
◽
2013 ◽
Vol 370
◽
pp. 154-156
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Keyword(s):