Precision focusing mirror alignment at SACLA using new nanobeam diagnosis (Conference Presentation)

Advances in X-Ray/EUV Optics and Components XIV ◽

10.1117/12.2526972 ◽

2019 ◽

Author(s):

Takato Inoue ◽

Satoshi Matsuyama ◽

Nami Nakamura ◽

Hirokatsu Yumoto ◽

Yuichi Inubushi ◽

...

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