Absolute distance measurement of optical path length of non-contact three-dimensional nanoprofiler based on normal vector tracing method by tandem white-light interferometer
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2015 ◽
2015 ◽
Vol 33
(5)
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pp. 051808
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2019 ◽
Vol 139
(1)
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pp. 113-118
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1998 ◽
Vol 6
(1)
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pp. 41-46
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