Impact of process parameters on super-smooth surface of the fused silica created by magnetorheological finishing: simulation and experimental study

Author(s):  
Jiabao Liu ◽  
Yunfei Zhang ◽  
Jianwei Ji ◽  
xiaoyuan Li ◽  
Minheng Ye ◽  
...  
2016 ◽  
Vol 1136 ◽  
pp. 293-296
Author(s):  
Shao Hui Yin ◽  
Yong Qiang Wang ◽  
Ye Peng Li ◽  
Shen Gong

To improve surface planarity, a translational movement is added into the magnetorheoloigcal planarization process. To explore effects of some process parameters, including trajectory type, stroke and reciprocate velocity, on surface planarity, a set of finishing experiments are carried out. The results show that planarity is well improved when the trough reciprocates perpendicularly to the air gap. Surface planarity decreases as stoke increases but is hardly affected by reciprocate velocity. Using the magnetorheoloigcal planarization process with addition of translational movement, an ultra-smooth surface with planarity of micron order in PV is achieved on a K9 optical glass.


Silicon ◽  
2021 ◽  
Author(s):  
Huawei Song ◽  
Pengfei Pan ◽  
Kaihua Xu ◽  
Yuping Zhang ◽  
Zhengxin Yang ◽  
...  

2016 ◽  
Vol 874 ◽  
pp. 291-296 ◽  
Author(s):  
Lin Li ◽  
Jun Wang ◽  
Huai Zhong Li

An experimental study is reported to characterise the femtosecond (FS) laser grooving process for Germanium (Ge) substrates. The effects of process parameters, including laser fluence, pulse repetition rate and scan speed, on the groove characteristics, material removal rate (MRR) and heat affected zone (HAZ) size are discussed. It is shown that with properly selected process parameters, high quality micro-grooves can be obtained on Ge wafers. Recommendations are finally made on the selection of the most appropriate process parameters for FS micro-grooving of Ge substrates.


2013 ◽  
Vol 12 (21) ◽  
pp. 6154-6158
Author(s):  
Xiao Kang-Yi ◽  
Chuan Feng-Li ◽  
Shu Gang-Li ◽  
He Lei Cui ◽  
Wen Fu-Wu

2015 ◽  
Vol 27 (4) ◽  
pp. 42001
Author(s):  
王洪祥 Wang Hongxiang ◽  
朱本温 Zhu Benwen ◽  
陈贤华 Chen Xianhua ◽  
侯晶 Hou Jing ◽  
王景贺 Wang Jinghe

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