Fabrication of multi-layer micropillars array in micro-grooving technology

Author(s):  
senbin Xia ◽  
yunbo He ◽  
sujuan Wang
Keyword(s):  
1998 ◽  
Vol 64 (628) ◽  
pp. 4887-4892 ◽  
Author(s):  
Nuttaphong SORNSUWIT ◽  
Yoshimi TAKEUCHI ◽  
Kiyoshi SAWADA ◽  
Toshio SATA

2021 ◽  
Author(s):  
Morshed Khandaker ◽  
Onur Can Kalay ◽  
Fatih Karpat ◽  
Amgad Haleem ◽  
Wendy Williams ◽  
...  

2016 ◽  
Vol 874 ◽  
pp. 291-296 ◽  
Author(s):  
Lin Li ◽  
Jun Wang ◽  
Huai Zhong Li

An experimental study is reported to characterise the femtosecond (FS) laser grooving process for Germanium (Ge) substrates. The effects of process parameters, including laser fluence, pulse repetition rate and scan speed, on the groove characteristics, material removal rate (MRR) and heat affected zone (HAZ) size are discussed. It is shown that with properly selected process parameters, high quality micro-grooves can be obtained on Ge wafers. Recommendations are finally made on the selection of the most appropriate process parameters for FS micro-grooving of Ge substrates.


2006 ◽  
Vol 34 (12) ◽  
pp. 842-847 ◽  
Author(s):  
Yoshihiko MATSUOKA ◽  
Makoto HIRASAWA

2020 ◽  
Vol 14 (2) ◽  
pp. 200-207 ◽  
Author(s):  
Tatsuhiko Aizawa ◽  
Yasuo Saito ◽  
Hideharu Hasegawa ◽  
Kenji Wasa ◽  
◽  
...  

Micro-embossing using plasma printed micro-punch was proposed to form micro-groove textures into the copper substrate for plastic packaging of hollowed GaN HEMT-chips. In particular, the micro-groove network on the copper substrate was optimized to attain uniform stress distribution with maximum stress level being as low as possible. Three-dimensional finite element analysis was employed to investigate the optimum micro-grooving texture-topology and to attain the uniform stress distribution on the joined interface between the plastic mold and the textured copper substrate. Thereafter, plasma printing was utilized to fabricate the micro-punch for micro-embossing of the micro-grooving network into the copper substrate as a designed optimum micro-texture. This plasma printing mainly consisted of three steps. Two-dimensional micro-pattern was screen-printed onto the AISI316 die surface as a negative pattern of the optimum CAD data. The screen-printed die was plasma nitrided at 673 K for 14.4 ks at 70 Pa under the hydrogen-nitrogen mixture for selective nitrogen supersaturation onto the unprinted die surfaces. A micro-punch was developed by mechanically removing the printed parts of die material. Then, fine computer numerical control (CNC) stamping was used to yield the micro-embossed copper substrate specimens. Twelve micro-textured substrates were molded into packaged specimens by plastic molding. Finally, gross leak testing was employed to evaluate the integrity of the joined interface. The takt time required to yield the micro-grooved copper substrate by the present method was compared to the picosecond laser micro-grooving; the former showed high productivity based on this parameter.


Author(s):  
J Wang ◽  
A Moridi ◽  
P Mathew

An investigation of the micro-grooving performance of abrasive air jet (AAJ) on quartz crystals is presented and discussed. An experimental study was carried out first to understand the effect of process parameters on the major grooving performance measures such as groove depth, groove width, kerf taper, and surface roughness. Plausible trends for these grooving performance measures with respect to the various process variables, such as air pressure, nozzle traverse speed, jet impact angle, and abrasive mass flowrate, are discussed. It is found that AAJ is an effective technology for micromachining of quartz crystals and the grooving performance can be improved or optimized by selecting the process parameters properly. Predictive models are then developed for quantitatively estimating the micro-grooving performance. The models are finally verified by an experiment. It shows that the model predictions are in good agreement with the experimental results under the corresponding conditions.


2010 ◽  
Vol 443 ◽  
pp. 645-651 ◽  
Author(s):  
Alireza Moridi ◽  
Jun Wang ◽  
Yasser M. Ali ◽  
Philip Mathew ◽  
Xiao Ping Li

Owing to its various distinct advantages over the other machining technologies, abrasive jet machining has become a promising machining technology for brittle and hard-to-machine materials. An experimental study is presented on the micro-grooving of quartz crystals using an abrasive airjet. The effect of the various process parameters on the major machining performance measures are analysed to provide a deep understanding of this micro-machining process. Predictive models are then developed for quantitatively estimating the machining performance. The models are finally verified by an experiment. It shows that the model predictions are in good agreement with the experimental results under the corresponding conditions.


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