High energy excimer laser system for nanosecond annealing of semiconductor devices

2019 ◽  
Author(s):  
HERVE BESAUCELE ◽  
LAURENT RUET ◽  
AUDREY ADNET ◽  
FRANCOIS BEAU ◽  
CEDRIC BELLIER ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Semiconductor Devices ◽  
Laser System ◽  
High Energy

Preliminary results on the development of a nanosecond high-energy oscillator: regenerative-amplifier excimer laser system

1998 ◽  
Author(s):  
Olivier P. Uteza ◽  
Philippe C. Delaporte ◽  
Bernard L. Fontaine ◽  
Marc L. Sentis ◽  
Stephane Branly ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser System ◽  
High Energy ◽  
Regenerative Amplifier ◽  
Preliminary Results

Development of a nanosecond high-energy oscillator/four-pass amplifier excimer laser system

2000 ◽  
Author(s):  
Olivier P. Uteza ◽  
Philippe C. Delaporte ◽  
Bernard L. Fontaine ◽  
Marc L. Sentis
Keyword(s):  
Excimer Laser ◽  
Laser System ◽  
High Energy

Nanosecond high-energy oscillator: regenerative amplifier excimer laser system

2000 ◽  
Author(s):  
Olivier P. Uteza ◽  
Nathalie Destouches ◽  
Philippe C. Delaporte ◽  
Bernard L. Fontaine ◽  
Marc L. Sentis
Keyword(s):  
Excimer Laser ◽  
Laser System ◽  
High Energy ◽  
Regenerative Amplifier

Demonstration of a diode pumped Nd,Y co-doped SrF 2 crystal based, high energy chirped pulse amplification laser system

2017 ◽  
Vol 382 ◽  
pp. 201-204 ◽  
Author(s):  
Junchi Chen ◽  
Yujie Peng ◽  
Zongxin Zhang ◽  
Hongpeng Su ◽  
Yuxin Leng ◽  
...  
Keyword(s):  
Laser System ◽  
High Energy ◽  
Chirped Pulse ◽  
Pulse Amplification ◽  
Chirped Pulse Amplification ◽  
Diode Pumped ◽  
Co Doped
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