Imaging behavior of highly fluorinated molecular resists under extreme UV radiation

2019 ◽  
Author(s):  
Hyuntaek Oh ◽  
Seok-Heon Jung ◽  
Jeong-Seok Mun ◽  
Kanghyun Kim ◽  
Sangsul Lee ◽  
...  
Keyword(s):  
Uv Radiation ◽  
Extreme Uv

Research at GOI on x-rays and extreme-UV radiation from the sun

2008 ◽  
Vol 75 (12) ◽  
pp. 785 ◽  
Author(s):  
S. V. Avakyan ◽  
I. M. Afanas'ev ◽  
V. G. Bogdanov ◽  
S. V. Boyutkevich ◽  
N. A. Voronin ◽  
...  
Keyword(s):  
Uv Radiation ◽  
The Sun ◽  
X Rays ◽  
Extreme Uv

Compression zone of a magnetoplasma compressor as a source of extreme UV radiation

2012 ◽  
Vol 38 (2) ◽  
pp. 110-115 ◽  
Author(s):  
I. E. Garkusha ◽  
V. V. Chebotarev ◽  
D. G. Solyakov ◽  
Yu. V. Petrov ◽  
M. S. Ladygina ◽  
...  
Keyword(s):  
Uv Radiation ◽  
Compression Zone ◽  
Magnetoplasma Compressor ◽  
Extreme Uv

Sparsity-based super-resolution coherent diffractive imaging of (practically) 1D images using extreme UV radiation.

CLEO: 2013 ◽  
2013 ◽  
Author(s):  
Pavel Sidorenko ◽  
Avner Fleischer ◽  
Yoav Shechtman ◽  
Yonina Eldar ◽  
Mordechai Segev ◽  
...  
Keyword(s):  
Uv Radiation ◽  
Super Resolution ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging ◽  
Extreme Uv

Dual-pulse bispectral laser excitation and plasma initiation in an extreme-UV radiation source for nanolithography

2017 ◽  
Vol 84 (11) ◽  
pp. 753
Author(s):  
R. P. Seĭsyan ◽  
V. G. Bespalov ◽  
A. P. Zhevlakov ◽  
E. A. Makarov ◽  
A. Yu. Rodionov
Keyword(s):  
Uv Radiation ◽  
Radiation Source ◽  
Laser Excitation ◽  
Extreme Uv

Characterization of detectors for extreme UV radiation

Metrologia ◽  
2006 ◽  
Vol 43 (2) ◽  
pp. S6-S10 ◽  
Author(s):  
F Scholze ◽  
R Klein ◽  
R Müller
Keyword(s):  
Uv Radiation ◽  
Extreme Uv

scholarly journals Characterization of Extreme UV Radiation from Laser Produced Spherical Tin Plasmas for Use in Lithography

2004 ◽  
Vol 80 (4) ◽  
pp. 325-330 ◽  
Author(s):  
Hiroaki NISHIMURA ◽  
Keisuke SHIGEMORI ◽  
Mitsuo NAKAI ◽  
Shinsuke FUJIOKA ◽  
Yoshinori SHIMADA ◽  
...  
Keyword(s):  
Uv Radiation ◽  
Extreme Uv ◽  
Tin Plasmas

scholarly journals Effects of X-ray and extreme UV radiation on circumbinary planets

2014 ◽  
Vol 570 ◽  
pp. A50 ◽  
Author(s):  
J. Sanz-Forcada ◽  
S. Desidera ◽  
G. Micela
Keyword(s):  
Uv Radiation ◽  
X Ray ◽  
Extreme Uv ◽  
Circumbinary Planets
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