Improved hemicellulose spin on carbon hardmask

Advances in Patterning Materials and Processes XXXVI ◽

10.1117/12.2514915 ◽

2019 ◽

Author(s):

Kazuyo Morita ◽

Kimiko Yamamoto ◽

Hiroki Tanaka ◽

Yasuaki Tanaka ◽

Masahiko Harumoto ◽

...

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