Feedforward control with rate-dependent hysteresis compensator for piezoelectric micro stage (Conference Presentation)
2021 ◽
pp. 1045389X2110482
2019 ◽
Vol 4
(3)
◽
pp. 2340-2347
◽
2019 ◽
Vol 28
(2S)
◽
pp. 915-924
◽
1996 ◽
Vol 49
(3)
◽
pp. 745-764
◽
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