Experimental study on non-linear calibration of two-dimensional nano-positioning stage

Author(s):  
zhou qi ◽  
qi Li ◽  
yushu Shi ◽  
shi Li ◽  
Lu Huang ◽  
...  
1983 ◽  
Vol S7-XXV (3) ◽  
pp. 319-326 ◽  
Author(s):  
Angel Fernandez ◽  
Jean-Louis Feybesse ◽  
Jean-Francois Mezure

Sign in / Sign up

Export Citation Format

Share Document