A real-time distance measurement data processing platform for multi-axis grating interferometry type optical encoders
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2016 ◽
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2021 ◽
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2011 ◽
Vol 328-330
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pp. 989-997
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2012 ◽
Vol 2012
(0)
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pp. _2A2-F07_1-_2A2-F07_3
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