Femtosecond laser induced damage threshold (LIDT) of 3D nanolithography made micro- and nano-optical elements

2019 ◽  
Author(s):  
Agnė Butkutė ◽  
Linas Jonušauskas ◽  
Darius Gailevičius ◽  
Vygantas Mizeikis ◽  
Mangirdas Malinauskas
Keyword(s):  
Femtosecond Laser ◽  
Damage Threshold ◽  
Optical Elements ◽  
Laser Induced Damage

scholarly journals High laser induced damage threshold photoresists for nano-imprint and 3D multi-photon lithography

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Elmina Kabouraki ◽  
Vasileia Melissinaki ◽  
Amit Yadav ◽  
Andrius Melninkaitis ◽  
Konstantina Tourlouki ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Three Dimensional ◽  
Damage Threshold ◽  
Laser Pulses ◽  
Intense Laser ◽  
Optical Elements ◽  
Photonic Circuits ◽  
Future Production ◽  
Intense Laser Pulses ◽  
Laser Induced Damage

Abstract Optics manufacturing technology is predicted to play a major role in the future production of integrated photonic circuits. One of the major drawbacks in the realization of photonic circuits is the damage of optical materials by intense laser pulses. Here, we report on the preparation of a series of organic–inorganic hybrid photoresists that exhibit enhanced laser-induced damage threshold. These photoresists showed to be candidates for the fabrication of micro-optical elements (MOEs) using three-dimensional multiphoton lithography. Moreover, they demonstrate pattern ability by nanoimprint lithography, making them suitable for future mass production of MOEs.

Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-Nano Deliquescence

2012 ◽  
Vol 497 ◽  
pp. 165-169 ◽  
Author(s):  
He Ping Zhang ◽  
Dong Ming Guo ◽  
Xu Wang ◽  
Hang Gao
Keyword(s):  
Large Scale ◽  
Surface Condition ◽  
Single Point ◽  
Damage Threshold ◽  
Diamond Turning ◽  
Water Soluble ◽  
Optical Elements ◽  
Kdp Crystal ◽  
Computer Controlled ◽  
Laser Induced Damage

Although Single Point Diamond Turning (SPDT) can do pretty well in optical surfacing of large scale KDP crystal, both the surface accuracy and integrity are considerably high; meanwhile as the defects of micro-waveness and stress are inevitable, the laser-induced damage threshold of KDP optical elements after SPDT still cannot be satisfied. Because of the characters of deliquescent and water-soluble, the process of computer controlled Micro-nano deliquescence is attempted to remove the residual micro-waveness on KDP surface after SPDT. Based on the assumption of Preston and the characters of Micro-nano deliquescence, the model of material removal ratio is suggested, the dwell time for ascertained KDP surface is solved, the processing of computer controlled Micro-nano deliquescence is simulated and the processed surface condition on theory is obtained. Besides, the influences of different parameters on the surfacing efficiency and accuracy are analyzed. Finally, three polishing tracks are comparatively analyzed. The simulation results are quite important in guiding the experimental polishing of large scale KDP by computer controlled Micro-nano deliquescence

Wavelength dependence of femtosecond laser-induced damage threshold of optical materials

2015 ◽  
Vol 117 (22) ◽  
pp. 223103 ◽  
Author(s):  
L. Gallais ◽  
D.-B. Douti ◽  
M. Commandré ◽  
G. Batavičiūtė ◽  
E. Pupka ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Optical Materials ◽  
Damage Threshold ◽  
Wavelength Dependence ◽  
Laser Induced Damage

scholarly journals Express method of estimating laser-induced surface damage threshold for optical components

2002 ◽  
Vol 20 (1) ◽  
pp. 133-137 ◽  
Author(s):  
V.S. SIRAZETDINOV ◽  
V.N. ALEKSEEV ◽  
D.I. DMITRIEV ◽  
A.V. CHARUKHCHEV ◽  
V.N. CHERNOV ◽  
...  
Keyword(s):  
Laser System ◽  
Damage Threshold ◽  
Surface Damage ◽  
Film Coating ◽  
Statistical Nature ◽  
Thin Film Coating ◽  
Optical Elements ◽  
Optical Components ◽  
System A ◽  
Laser Induced Damage

The present measurements of the components' surface resistance to laser-induced damage has been completed to facilitate development and construction of the “Luch” laser system, a four-channel Nd-phosphate glass laser with a full output energy of E = 14–16 kJ. The study describes a method that, with a series of experimental data obtained from a single sample, allows us not only to estimate the threshold fluences, but to take into account the statistical nature of the surface damage. In a number of experimental situations this method makes it possible to estimate damaging fluences even from the result of a single exposure of the studied surface. Estimated threshold fluences for various optical elements are presented: K8 glass, experimental phosphate laser glass KGSS-0180, high-reflecting and antireflecting thin-film coating of elements. The 1.054-μm radiation pulse with half-height duration of 4 ns and the irradiation spot of ∼4 mm in diameter were used in the experiment.

scholarly journals Diamond diffractive optics—recent progress and perspectives

2020 ◽  
Vol 0 (0) ◽  
Author(s):  
Marcell Kiss ◽  
Sichen Mi ◽  
Gergely Huszka ◽  
Niels Quack
Keyword(s):  
Chemical Resistance ◽  
Academic Research ◽  
Damage Threshold ◽  
High Refractive Index ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Steady Growth ◽  
Research Activities ◽  
Laser Induced Damage ◽  
Critical Components

AbstractDiamond is an exceptional material that has recently seen a remarkable increase in interest in academic research and engineering since high-quality substrates became commercially available and affordable. Exploiting the high refractive index, hardness, laser-induced damage threshold, thermal conductivity and chemical resistance, an abundance of applications incorporating ever higher-performance diamond devices has seen steady growth. Among these, diffractive optical elements stand out—with progress in fabrication technologies, micro- and nanofabrication techniques have enabled the creation of gratings and diffractive optical elements with outstanding properties. Research activities in this field have further been spurred by the unique property of diamond to be able to host optically active atom scale defects in the crystal lattice. Such color centers allow generation and manipulation of individual photons, which has contributed to accelerated developments in engineering of novel quantum applications in diamond, with diffractive optical elements amidst critical components for larger-scale systems. This review collects recent examples of diffractive optical devices in diamond, and highlights the advances in manufacturing of such devices using micro- and nanofabrication techniques, in contrast to more traditional methods, and avenues to explore diamond diffractive optical elements for emerging and future applications are put in perspective.

The Optimization of Termination in Combined Technique of Magnetorheological Finishing and HF Etching for Laser-Induced Damage Threshold High-Efficiency Improving of Fused Silica

2014 ◽  
Vol 1027 ◽  
pp. 199-202
Author(s):  
Ye Tian ◽  
Xiao Qiang Peng ◽  
Yi Fan Dai ◽  
Feng Shi ◽  
Wen Wan
Keyword(s):  
High Efficiency ◽  
Experimental Parameter ◽  
Damage Threshold ◽  
Fused Silica ◽  
Fdtd Simulation ◽  
Structural Defects ◽  
Process Time ◽  
Optical Elements ◽  
Laser Systems ◽  
Laser Induced Damage

The developing high-power laser systems are requiring higher laser-induced damage threshold (LIDT) and fabrication efficiency of fused silica optical elements. To solve these problems, MRF polishing and HF etching have been combined utilized wiping and passivating structural defects as well as removing impurities. Furthermore, the LIDT improvement is dependent greatly on the corporation of processes. But the LIDT improving mechanism is partly ambiguous yet, that may lead to random or experimental parameter choice and ultimately generate unsatisfied results. Consequently, this paper focuses on the termination mechanism of the process. Atom Force Microscope (AFM) measurement, finite difference time-domain (FDTD) simulation and LIDT test will be utilized to analysis and validate the optimization theoretically and practically. Finally, in one side, the LIDT value of optimized-terminated sample is 16.7J/cm2, which is about the same level (even 3.7% higher) as that of the over-etched one. In another side, the etching process time could be shorted by 32% using the optimized method.

scholarly journals Femtosecond laser-induced damage threshold of nematic liquid crystals at 1030  nm

2021 ◽  
Vol 60 (26) ◽  
pp. 8050
Author(s):  
Loic Ramousse ◽  
Gilles Chériaux ◽  
Cyrille Claudet ◽  
Aurélie Jullien
Keyword(s):  
Liquid Crystals ◽  
Femtosecond Laser ◽  
Nematic Liquid Crystals ◽  
Damage Threshold ◽  
Laser Induced Damage

scholarly journals Observation and analysis of structural changes in fused silica by continuous irradiation with femtosecond laser light having an energy density below the laser-induced damage threshold

2014 ◽  
Vol 5 ◽  
pp. 1334-1340 ◽  
Author(s):  
Wataru Nomura ◽  
Tadashi Kawazoe ◽  
Takashi Yatsui ◽  
Makoto Naruse ◽  
Motoichi Ohtsu
Keyword(s):  
Molecular Structure ◽  
Energy Density ◽  
Femtosecond Laser ◽  
Laser Light ◽  
Damage Threshold ◽  
Fused Silica ◽  
Optical Component ◽  
Continuous Irradiation ◽  
Silica Substrate ◽  
Laser Induced Damage

The laser-induced damage threshold (LIDT) is widely used as an index for evaluating an optical component’s resistance to laser light. However, a degradation in the performance of an optical component is also caused by continuous irradiation with laser light having an energy density below the LIDT. Therefore, here we focused on the degradation in performance of an optical component caused by continuous irradiation with femtosecond laser light having a low energy density, i.e., laser-induced degradation. We performed an in situ observation and analysis of an increase in scattering light intensity in fused silica substrates. In experiments conducted using a pulsed laser with a wavelength of 800 nm, a pulse width of 160 fs and pulse repetition rate of 1 kHz, we found that the scattered light intensity increased starting from a specific accumulated fluence, namely, that the laser-induced degradation had a threshold. We evaluated the threshold fluence F t as 6.27 J/cm2 and 9.21 J/cm2 for the fused silica substrates with surface roughnesses of 0.20 nm and 0.13 nm in R a value, respectively, showing that the threshold decreased as the surface roughness increased. In addition, we found that the reflected light spectrum changed as degradation proceeded. We analyzed the details of the degradation by measuring instantaneous reflectance changes with a pump–probe method; we observed an increase in the generation probability of photogenerated carriers in a degraded silica substrate and a damaged silica substrate and observed a Raman signal originating from a specific molecular structure of silica. From these findings, we concluded that compositional changes in the molecular structure occurred during degradation due to femtosecond laser irradiation having an energy density below the LIDT.

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