Compact FTIR engine made through MOEMS technology

MOEMS and Miniaturized Systems XVIII ◽

10.1117/12.2508985 ◽

2019 ◽

Author(s):

Tomofumi Suzuki ◽

Tatsuya Sugimoto ◽

Kyosuke Kotani ◽

Yutaka Kuramoto ◽

Katsumi Shibayama

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