A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage

MOEMS and Miniaturized Systems XVIII ◽

10.1117/12.2507659 ◽

2019 ◽

Cited By ~ 1

Author(s):

Liang Zhou ◽

Zhi Li ◽

Mengyue Liang ◽

Yanping Chen ◽

Xiaoyang Zhang ◽

...

Download Full-text