The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer

2019 ◽  
Author(s):  
Yu Wang ◽  
Zengxiong Lu ◽  
Jiani Su ◽  
Wei Qi ◽  
Bing Li ◽  
...  
Keyword(s):  
Laser Interferometer ◽  
Angular Measurement ◽  
Dual Frequency ◽  
Motion Platform ◽  
Motion Direction ◽  
Frequency Laser

Precision measurement of microscopic module through dual-frequency laser interferometer

2015 ◽  
Vol 36 (2) ◽  
pp. 259-265 ◽  
Author(s):  
Xue Yuan ◽  
◽  
Chen Qing-shan ◽  
Liu Li-shuang ◽  
Lyu Yong
Keyword(s):  
Precision Measurement ◽  
Laser Interferometer ◽  
Dual Frequency ◽  
Frequency Laser

Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System

2014 ◽  
Vol 41 (4) ◽  
pp. 0408004
Author(s):  
池峰 Chi Feng ◽  
朱煜 Zhu Yu ◽  
张志平 Zhang Zhiping ◽  
高为宫 Gao Weigong
Keyword(s):  
Measurement System ◽  
Laser Interferometer ◽  
Dual Frequency ◽  
Frequency Laser

Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

2019 ◽  
Vol 436 ◽  
pp. 264-268
Author(s):  
Yuan Yang ◽  
Yong Deng ◽  
Yidong Tan ◽  
Zhenyu Huang ◽  
Yong Zhang ◽  
...  
Keyword(s):  
Error Analysis ◽  
Experimental Measurement ◽  
Laser Interferometer ◽  
Dual Frequency ◽  
Nonlinear Error ◽  
Frequency Laser

Study of a dual-frequency laser interferometer with unique optical subdivision techniques

2006 ◽  
Vol 45 (10) ◽  
pp. 2246 ◽  
Author(s):  
Zhaogu Cheng ◽  
Haijun Gao ◽  
Zhiping Zhang ◽  
Huijie Huang ◽  
Jianqiang Zhu
Keyword(s):  
Laser Interferometer ◽  
Dual Frequency ◽  
Frequency Laser

A Precision Dual-Frequency Laser Interferometer for High Speed Target

2008 ◽  
Vol 7 (2) ◽  
pp. 382-385 ◽  
Author(s):  
Sheng-Hua Lee ◽  
Tian-Syung Lan ◽  
Yu-Tang Chen ◽  
Shand-Dad Liaw
Keyword(s):  
High Speed ◽  
Laser Interferometer ◽  
Dual Frequency ◽  
Frequency Laser
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