Sol-gel-derived lead and calcium lead titanate pyroelectric detectors on silicon MEMS structures

Author(s):  
James G. Ho ◽  
Phyllis R. Nelson ◽  
Felice H. Lin ◽  
David T. Chang ◽  
William J. Kaiser ◽  
...  
Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1073
Author(s):  
Elham Mafi ◽  
Nicholas Calvano ◽  
Jessica Patel ◽  
Md. Sherajul Islam ◽  
Md. Sakib Hasan Khan ◽  
...  

We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O2 environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O2 environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca0.43Pb0.57) TiO3 (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m2K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy.


2007 ◽  
Vol 121-123 ◽  
pp. 149-152
Author(s):  
Liang Sheng Qiang ◽  
Dong Yan Tang ◽  
Xing Hong Zhang ◽  
L. Jin

By adding methyl alcohol/water solution with certain concentration into sol to hydrolysis directly and sintering the fresh sol directly, lead titanate(PbTiO3) ceramics doped with magnesium are prepared by using magnesium acetate as doper to prohibit the disadvantages contained in conventional sol-gel method, such as low hydrolytic rate, high sintering temperature, long preparation period. The changes of structure, microstructure, synthesis process and electric properties of modified ceramics are studied in detail. The sizes and morphology of high purely and high density magnesium doped lead titanate nanocrystals thus obtained are observed by TEM photographs and the structures and affection of sintering temperature of to lattice constant and sizes of nanocrystals are detected by XRD. Electric properties detection results show that doped lead titanate ceramics exhibite excellent dielectric, ferroelectric and pyroelectric properties compare with pure lead titanate.


ChemInform ◽  
2010 ◽  
Vol 30 (19) ◽  
pp. no-no
Author(s):  
Sunuk Kim ◽  
Myong-cheol Jun ◽  
Soon-cheol Hwang

1985 ◽  
Vol 62 (1) ◽  
pp. 189-194 ◽  
Author(s):  
S. R. Gurkovich ◽  
J. B. Blum

2013 ◽  
Vol 28 (4) ◽  
pp. 254-261 ◽  
Author(s):  
Hasitha Ganegoda ◽  
James A. Kaduk ◽  
Carlo U. Segre

A series of iron-doped lead titanate PbTi(1−x)FexO(3−δ) samples in the x = 0–1 composition range was prepared using sol–gel synthesis at a calcination temperature of 700 °C. The room temperature CuKα powder diffraction data collected from x = 0, 0.005, 0.01, 0.025, 0.05, 0.075, 0.1, 0.125, 0.15, 0.175, 0.2, and 0.3 samples were analyzed using the Rietveld method. Magnetoplumbite (PbFe12O19) secondary phase formation was observed at compositions x = 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, and 1. Fe-composition dependent decrease of tetragonal distortion has been observed. According to Vegard's law, the B-site iron solubility limit in the lead titanate host was found to be approximately 10 mol% (x = 0.1). Homogeneous distribution of dopants below the solubility limit was evidenced by the linear behavior of unit-cell parameters. The absence of a cubic phase and the persistence of distorted oxygen octahedra indicated the existence of ferroelectric properties even at the x = 0.3 composition. Beyond x = 0.3, the P4mm tetragonal model was determined to be invalid possibly because of oxygen defect driven structural changes, mainly tilting Fe-polyhedra.


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