Stabilized extrinsic fiber optic Fabry-Perot sensor for surface acoustic wave detection

1991 ◽  
Author(s):  
Tuan Tran
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Fiber Optic ◽  
Wave Detection ◽  
Fabry Perot

Stabilized extrinsic fiber optic Fabry-Perot sensor for surface acoustic wave detection

1991 ◽  
Author(s):  
Tuan A. Tran ◽  
William V. Miller III ◽  
Kent A. Murphy ◽  
Ashish M. Vengsarkar ◽  
Richard O. Claus
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Fiber Optic ◽  
Wave Detection ◽  
Fabry Perot

Stabilized extrinsic fiber-optic Fizeau sensor for surface acoustic wave detection

1992 ◽  
Vol 10 (10) ◽  
pp. 1499-1506 ◽  
Author(s):  
T.A. Tran ◽  
W.V. Miller ◽  
K.A. Murphy ◽  
A.M. Vengsarkar ◽  
R.O. Claus
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Fiber Optic ◽  
Wave Detection

scholarly journals Characteristic measurement of a surface acoustic wave nano-stepping motor by using a fiber-optic Michelson interferometer

2019 ◽  
Vol 11 (9) ◽  
pp. 168781401987619 ◽  
Author(s):  
Tai-Ho Yu
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Fiber Optic ◽  
Surface Acoustic Waves ◽  
Michelson Interferometer ◽  
Digital Signal ◽  
Driving Frequency ◽  
Semiconductor Fabrication ◽  
Characteristic Measurement

The actuation technique of a surface acoustic wave motor with nanometer scale linear motion was experimentally investigated in this study. The surface acoustic wave motor comprised a stator made of a Y+128° cut, X-propagation lithium niobate substrate with silicon sliders and an array of pillar projections manufactured using semiconductor fabrication techniques. Two sets of interdigital transducers deposited on the substrate were used to generate Rayleigh waves with a driving frequency of up to 9.7 MHz. The surface acoustic wave motor was driven by friction exerted on the contact area between the slider and the surface acoustic waves in a retrogressive elliptical locus. The stepping motion of the surface acoustic wave motor was measured directly using a fiber-optic Michelson interferometer through demodulation with a digital signal processing method. A displacement of several nanometers was achieved at each step during the experiment.

Transverse surface acoustic wave detection by scanning acoustic force microscopy

1998 ◽  
Vol 73 (7) ◽  
pp. 882-884 ◽  
Author(s):  
G. Behme ◽  
T. Hesjedal ◽  
E. Chilla ◽  
H.-J. Fröhlich
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Force Microscopy ◽  
Wave Detection
Sign in / Sign up

Export Citation Format

Share Document