Fabrication of shape memory alloy based microrobot by using focused ion beam milling process and actuation using ultraviolet laser

2018 ◽  
Author(s):  
Min-Soo Kim ◽  
Hyun-Taek Lee ◽  
Kang-In Lee ◽  
Sung-Hoon Ahn
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Milling Process ◽  
Ultraviolet Laser ◽  
Focused Ion Beam Milling

Focused Ion Beam Milling of Crystalline Diamonds

2011 ◽  
Vol 1282 ◽  
Author(s):  
Rustin Golnabi ◽  
Won I. Lee ◽  
Deok-Yang Kim ◽  
Glen R. Kowach
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Milling Process ◽  
Pattern Design ◽  
Wide Range ◽  
Milling Method ◽  
Micrometer Size ◽  
New Applications ◽  
Milling Yield ◽  
Focused Ion Beam Milling

ABSTRACTRecently, a wide range of new applications of diamond materials such as spintronics, field emission, and bio-sensing have been proposed. These applications often require the precise patterning of diamonds, which is not trivial because diamonds are the hardest materials known in nature. Among various patterning techniques, the focused ion beam milling method has been proven to provide flexibility as well as high resolution in the pattern design. In this study, a focused beam of 30 kV Ga+ ions was utilized to create sub-micrometer size patterns out of crystalline diamonds. The sputtering rate, re-deposition, and surface roughening of diamond structure have been closely monitored with various milling parameters during the milling process. Our study revealed a low milling yield of 0.02 μm3/nC, high Ga content re-deposition, and the formation of sub-micron scale terracing on the sidewall of patterned diamonds.

Deformation of Biomedical AuCuAl-Based Shape Memory Alloy Micropillars

MRS Advances ◽  
2017 ◽  
Vol 2 (26) ◽  
pp. 1411-1415 ◽  
Author(s):  
Akira Umise ◽  
Rui Serizawa ◽  
Sari Yanagida ◽  
Kenji Goto ◽  
Masaki Tahara ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Shape Recovery ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Transformation Strain ◽  
Xrd Analysis ◽  
Second Phase ◽  
Shape Memory Property ◽  
Good Shape

ABSTRACTThe deformation behavior and shape recovery of an Fe-added AuCuAl shape memory alloy micropillar were investigated. XRD analysis revealed that Au-28Cu-22Al-2Fe (at.%) alloy contained a second phase which was evaluated to be α-Fe (bcc). SEM observation also confirmed the second phase at the surface of the micropillar specimen. A polycrystalline micropillar with 20 x 20 x 40μm rectangular was fabricated by a focused ion beam (FIB) system, and micro compress test was performed at room temperature. It was found that the yield stress of micropillar showed 50MPa, which must correspond to stress for inducing martensite. After the heating of the compressed micropillar, 1.75% shape recovery was recognized which is comparable to the transformation strain. Then, the Fe-added AuCuAl micropillar was concluded to possess good shape memory property, and thus this alloy may be suitable for small endovascular treatment which requires good X-ray radiography.

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling

Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2013 ◽  
Vol 13 (8) ◽  
pp. 5542-5546 ◽  
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Lianying Zou ◽  
Bin Tian ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling
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