Workpiece self-weight in precision optics manufacturing: compensation of workpiece deformations by a fluid bearing
Keyword(s):
2019 ◽
Vol 2
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pp. 78-84
Keyword(s):
2006 ◽
Vol 111
(B1)
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Keyword(s):
Keyword(s):
1993 ◽
Vol 115
(2)
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pp. 215-224
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