Improved ion beam tools for ultra-precision figure correction of curved aluminium mirror surfaces

2018 ◽  
Author(s):  
Fred Pietag ◽  
Thomas Arnold ◽  
Jens Bauer ◽  
Melanie Ulitschka
Keyword(s):  
Ion Beam ◽  
Ultra Precision

scholarly journals Micrometer-scale machining of metals and polymers enabled by focused ion beam sputtering

1998 ◽  
Vol 546 ◽  
Author(s):  
D. P. Adams ◽  
G. L. Benavides ◽  
M. J. vasile
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
End Mills ◽  
Ultra Precision ◽  
Tool Shank ◽  
Micrometer Scale ◽  
Tool Cutting ◽  
Micro Tools

AbstractThis work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25μm diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26–28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.

High-Accuracy Intelligent Complex System by Using Electronic Parallel Datum

2007 ◽  
Author(s):  
Xiang-Wen Xiong ◽  
Bear L. Wynn
Keyword(s):  
Laser Beam ◽  
Control Method ◽  
Ion Beam ◽  
Control Process ◽  
Optical Emission ◽  
Work Piece ◽  
Beam Diameter ◽  
Direct Reading ◽  
Ultra Precision ◽  
Precise Testing

The method of electronic parallel datum is to calculate by a stereo angle between the two beams of light with inclination simulating parameters of an object and successfully replace the 6-DOF mechanical datum of the work piece by being pre-set in the work piece and system. This technique called electronic parallel datum method has high precision for the adoption of Scan & Micro-Staggered method; furthermore, the intelligent direct reading of 6-DOF mechanical datum and parameter storage function of the technique can greatly improve the performance of the system and at the same time offer the process control method and can be used for micro-fabrication and Micro-Manufacturing and general industrial (In particular, it can be used for Ultra precision manufacturing environment, because the diameter of the laser beam can reach 100 nm and ion beam diameter even reached the limit precision of 2nm, and optical emission types, including the ion beam, Universal laser beam and general light beam, which mainly use receiver spacing of nano-array CCD sensors). It is widely used in the intelligent control process and system such as installation and adjustment, and undoubtedly, is to be adopted in many technical fields, general Manufacturing and all general work piece, precise testing process. With the method the system will become more precise, run faster and cost less.

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces

2021 ◽  
Vol 21 (9) ◽  
pp. 4735-4739
Author(s):  
Sung-Taek Jung ◽  
Hyun-Jeong Kim ◽  
Eun-Chan Wi ◽  
Jung-Shik Kong ◽  
Joo-Hyung Lee ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Diamond Tool ◽  
Ion Beam ◽  
Free Form ◽  
Fabrication Technology ◽  
Optical Components ◽  
Nano Scale ◽  
Single Crystal Diamond ◽  
Ultra Precision ◽  
Free Form Surfaces

Recently, the technology of the industry has been increasing for diffractive optical elements, holograms, optical components, and next-generation display components. The advanced high value-added industry is designing fine patterns on ultra-precision optical components and applying them to various industries. In the case of the ultra-fine pattern, a contact-type machining technique is required because it requires a precise pattern in nano-scale units. In this paper, the fabrication technology of ultra-precision diamond which is essential in the ultra-precision processing technology was suggested. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam (FEI COMPANY, system Nova 600) equipment. The back fire method was applied without metal coating in order to carry out the process study and the focused beam of 30 keV Ga+ ions were carried out processing for various fabrication of diamond cutting tools. As a result of applying the backfire method through the process experiment, the cutting edge width of the ultra-precision diamond tool was verified 275 nm.

Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

2003 ◽  
Vol 27 (1) ◽  
pp. 59-69 ◽  
Author(s):  
Y.N Picard ◽  
D.P Adams ◽  
M.J Vasile ◽  
M.B Ritchey
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Precision Machining ◽  
Ultra Precision

Ultra-precision surface polishing using ion beam figuring

2012 ◽  
Author(s):  
Young-Sik Ghim ◽  
Shin-Jae You ◽  
Hyug-Gyo Rhee ◽  
Ho-Soon Yang ◽  
Yun-Woo Lee
Keyword(s):  
Ion Beam ◽  
Surface Polishing ◽  
Ultra Precision ◽  
Ion Beam Figuring

Ultra-precision Surface Finishing by Ion Beam Techniques

2007 ◽  
Vol 19 (5) ◽  
pp. 24-30 ◽  
Author(s):  
T. Hänsel ◽  
F. Frost ◽  
A. Nickel ◽  
T. Schindler
Keyword(s):  
Ion Beam ◽  
Surface Finishing ◽  
Ultra Precision
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