Monolithic Er/Yb double-clad fibre laser with FBG inscribed using the direct-write plane-by-plane fs-laser inscription method

2018 ◽  
Author(s):  
Antreas Theodosiou ◽  
Jan Aubrecht ◽  
Pavel Peterka ◽  
Ivan Kašík ◽  
Filip Todorov ◽  
...  
Keyword(s):  
Fibre Laser ◽  
Direct Write ◽  
Fs Laser

Ultrafast Laser Processing for Lab-on-a-Chip Device Manufacture

2004 ◽  
Vol 850 ◽  
Author(s):  
Koji Sugioka ◽  
Ya Cheng ◽  
Katsumi Midorikawa
Keyword(s):  
Heat Treatment ◽  
Laser Processing ◽  
Lab On A Chip ◽  
Ultrafast Laser ◽  
Wet Etching ◽  
Direct Write ◽  
Electric Control ◽  
Fs Laser ◽  
Laser Direct Write ◽  
Hollow Microstructures

ABSTRACT3D microstructuring of photosensitive glass is demonstrated by femtosecond (fs) laser for lab-on-a-chip manufacture. True 3D hollow microstructures embedded in the glass are fabricated by the fs laser direct write followed by heat treatment and successive wet etching. A variety of microcomponents for a lab-on-a-chip device like a microfluidics, a microvalve, a microoptics, a microlaser, etc. are fabricated by using this technique. The fs laser direct write process is also applied for selective metallization of internal walls of the hollow microstructures embedded in the glass for electric control of movement of the micromechanical components in the lab-on-a-chip device.

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

2018 ◽  
Vol 12 (2) ◽  
pp. 187-198 ◽  
Author(s):  
Chengwu Wang ◽  
Syuhei Kurokawa ◽  
Julong Yuan ◽  
Li Fan ◽  
Huizong Lu ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Laser Scanning ◽  
Femtosecond Laser Ablation ◽  
Processing Parameters ◽  
Direct Write ◽  
Time Duration ◽  
Scanning Velocity ◽  
Processing Modes ◽  
Fs Laser ◽  
Surface Morphologies

4H-SiC substrate was ablated by linearly polarized femtosecond (fs) laser in three direct write methods at different parameters, such as repetition rate, scanning velocity and fluence, etc. Two processing modes, transverse scanning mode (TSM) and cross irradiation mode (CIM), were introduced. The surface morphologies were observed by scanning electron microscopy (SEM) for detailed investigation. It was found that the surface morphologies differed remarkably at different processing parameters. Firstly, the shapes of micro craters fabricated at different repetition rates and ablation time duration were respectively investigated. The shape of fs laser spot was demonstrated to play an important role for the generation of micro craters. Secondly, the effect of scanning velocity on the formation of nanoripples and micro grooves were investigated. It was found that the spatial ripples could be refabricated during repeated fs laser ablation; periodic ripples and micro grooves depended on fs laser scanning velocity. Agglomerative substance was fabricated especially at slow scanning velocity. Furthermore, rippled surfaces induced at different fluence were achieved and exhibited. Regular and uniform surfaces with periodic ripples were fabricated at the fluence of 0.31∼0.38 J/cm2. Finally, CMP was carried out to study the effect of fs laser ablation on polishing.

The X-ray emission of micro-capillary target irradiated by fs laser

2001 ◽  
Vol 11 (PR2) ◽  
pp. Pr2-421-Pr2-424
Author(s):  
F. Zhong ◽  
L. Qin ◽  
J. Deng ◽  
X. Hu ◽  
Y. Zhu ◽  
...  
Keyword(s):  
X Ray ◽  
Fs Laser

ELECTRON BEAM DIRECT WRITE EFFECTS ON CMOS DEVICES

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-291-C4-294
Author(s):  
K. BARLOW
Keyword(s):  
Electron Beam ◽  
Direct Write

Direct Write Assembly of Three-dimensional PZT Woodpile Structure

2011 ◽  
Vol 26 (5) ◽  
pp. 495-498
Author(s):  
Kun-Peng CAI ◽  
Jing-Bo SUN ◽  
Bo LI ◽  
Ji ZHOU
Keyword(s):  
Three Dimensional ◽  
Direct Write ◽  
Woodpile Structure
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