The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD

2018 ◽  
Author(s):  
Chi-Chun Liu ◽  
Yann Mignot ◽  
Cheng Chi ◽  
Kafai Lai ◽  
Jing Sha ◽  
...  
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