Piezoelectric gas flow controller based on dual-bimorph actuators
1984 ◽
Vol 7
(1)
◽
pp. 48-48
◽
1990 ◽
Vol 1
(6)
◽
pp. 512-516
◽
1991 ◽
Vol 49
◽
pp. 894-895
2013 ◽
Vol 133
(11)
◽
pp. 858-866
◽
Keyword(s):
2016 ◽
Vol 11
(1)
◽
pp. 109
Keyword(s):