An MEMS optical fiber pressure sensor fabricated by Au-Au thermal-compression bonding

2018 ◽  
Author(s):  
Xue Wang ◽  
Shuang Wang ◽  
Junfeng Jiang ◽  
Kun Liu ◽  
Mengnan Xiao ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Thermal Compression

scholarly journals High-precision optical fiber pressure sensor using frequency-modulated continuous-wave laser interference

AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025038
Author(s):  
Lang Bai ◽  
Gang Zheng ◽  
Bin Sun ◽  
Xiongxing Zhang ◽  
Qiming Sheng ◽  
...  
Keyword(s):  
Optical Fiber ◽  
High Precision ◽  
Pressure Sensor ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Laser Interference ◽  
Wave Laser

Micromachined Pressure Sensors on Optical Fiber Tip

2009 ◽  
Vol 74 ◽  
pp. 149-152
Author(s):  
X.M. Zhang ◽  
M. Yu ◽  
Silas Nesson ◽  
H. Bae ◽  
A. Christian ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Linear Response ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Outer Diameter ◽  
Sensor Element ◽  
Batch Fabrication ◽  
In Vitro Measurements

This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa.

scholarly journals Gas Pressure Sensor Based on BDK-Doped Polymer Optical Fiber

Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 717 ◽  
Author(s):  
Xin Cheng ◽  
Yi Liu ◽  
Changyuan Yu
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Chemical Structure ◽  
High Sensitivity ◽  
Gas Pressure ◽  
Air Pressure ◽  
Response Behavior ◽  
Polymer Optical Fiber ◽  
The Stability ◽  
Doped Polymer

This paper presents a high sensitivity gas pressure sensor with benzyl-dimethylketal (BDK)-doped polymer optical fiber Bragg grating (POFBG), whose sensitivity is up to 8.12 pm/kPa and 12.12 pm/kPa in positive and negative pressure atmosphere, respectively. The high sensitivity can be explained by its porous chemical structure. The stability and response behavior under air pressure atmosphere has also been investigated. The new understanding of the air pressure response principle and sensitivity difference for the presented sensor can be a worthy reference.

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