scholarly journals Silicon wafer defect detection using high frequency guided waves

2018 ◽  
Author(s):  
Paul Fromme ◽  
Bernard Masserey ◽  
Jean-Luc Robyr ◽  
Michael Lauper
Keyword(s):  
Silicon Wafer ◽  
Defect Detection ◽  
High Frequency ◽  
Guided Waves

scholarly journals Defect detection in monocrystalline silicon wafers using high frequency guided waves

2019 ◽  
Author(s):  
Bernard Masserey ◽  
Mathieu Simon ◽  
Jean-Luc Robyr ◽  
Paul Fromme
Keyword(s):  
Defect Detection ◽  
High Frequency ◽  
Guided Waves ◽  
Silicon Wafers ◽  
Monocrystalline Silicon

DEFECT DETECTION IN MULTI-LAYERED STRUCTURES USING HIGH FREQUENCY GUIDED WAVES

2011 ◽  
Author(s):  
B. Masserey ◽  
E. Kostson ◽  
P. Fromme ◽  
Donald O. Thompson ◽  
Dale E. Chimenti
Keyword(s):  
Defect Detection ◽  
High Frequency ◽  
Guided Waves ◽  
Layered Structures

scholarly journals A compact Robot-based defect detection device design for silicon wafer

2020 ◽  
Vol 1449 ◽  
pp. 012111
Author(s):  
Xiaoyan Chen ◽  
Chundong Zhao ◽  
Jianyong Chen ◽  
Dongyang Zhang ◽  
Kuifeng Zhu ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Defect Detection ◽  
Device Design
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