High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography (Conference Presentation)

2018 ◽  
Author(s):  
Carlos A. Alonso-Ramos ◽  
Daniel Benedikovich ◽  
Diego Pérez-Galacho ◽  
Sylvain Guerber ◽  
Vladyslav Vakarin ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Grating Couplers ◽  
Ultraviolet Lithography ◽  
Deep Ultraviolet

The Application of Silicon Rich Nitride Films for Use as Deep-Ultraviolet Lithography Phase-Shifting Masks

1998 ◽  
Vol 37 (Part 1, No. 2) ◽  
pp. 571-576 ◽  
Author(s):  
Zhong-Tao Jiang ◽  
Tomuo Yamaguchi ◽  
Kentaro Ohshimo ◽  
Mitsuru Aoyama ◽  
Leo Asinovsky
Keyword(s):  
Phase Shifting ◽  
Ultraviolet Lithography ◽  
Deep Ultraviolet

Ultra-Efficient Silicon-on-Insulator Grating Couplers With Backside Metal Mirrors

2020 ◽  
Vol 26 (2) ◽  
pp. 1-6 ◽  
Author(s):  
Niklas Hoppe ◽  
Wissem Sfar Zaoui ◽  
Lotte Rathgeber ◽  
Yun Wang ◽  
Rouven H. Klenk ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Grating Couplers

scholarly journals Focusing Polarization Diversity Grating Couplers in Silicon-on-Insulator

2009 ◽  
Vol 27 (5) ◽  
pp. 612-618 ◽  
Author(s):  
Frederik Van Laere ◽  
Wim Bogaerts ◽  
Pieter Dumon ◽  
GÜnther Roelkens ◽  
Dries Van Thourhout ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Polarization Diversity ◽  
Grating Couplers

Nanofabrication with deep-ultraviolet lithography and resolution enhancements

1999 ◽  
Vol 17 (6) ◽  
pp. 3310 ◽  
Author(s):  
M. Fritze ◽  
S. Palmateer ◽  
P. Maki ◽  
J. Knecht ◽  
C. K. Chen ◽  
...  
Keyword(s):  
Ultraviolet Lithography ◽  
Deep Ultraviolet
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