Addressing EUV masks registration challenges through closed loop correction (Conference Presentation)

Author(s):  
Avi Cohen ◽  
Ofir Sharoni ◽  
Dirk Beyer ◽  
Christian Ehrlich
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2018 ◽  
Vol 130 (984) ◽  
pp. 025004 ◽  
Author(s):  
P. Pathak ◽  
O. Guyon ◽  
N. Jovanovic ◽  
J. Lozi ◽  
F. Martinache ◽  
...  

2007 ◽  
Author(s):  
Pascal Mercère ◽  
Mourad Idir ◽  
Thierry Moreno ◽  
Gilles Cauchon ◽  
Guillaume Dovillaire ◽  
...  

2019 ◽  
Vol 39 (5) ◽  
pp. 0522001
Author(s):  
杨宗峰 Yang Zongfeng ◽  
李文来 Li Wenlai ◽  
彭泰然 Peng Tairan ◽  
崔玉国 Cui Yuguo ◽  
马剑强 Ma Jianqiang

2010 ◽  
Vol 37 (2) ◽  
pp. 414-417
Author(s):  
代万俊 Dai Wanjun ◽  
胡东霞 Hu Dongxia ◽  
杨泽平 Yang Zeping ◽  
周维 Zhou Wei ◽  
赵军普 Zhao Junpu ◽  
...  

2018 ◽  
Vol 47 (10) ◽  
pp. 1020001
Author(s):  
范占斌 Fan Zhanbin ◽  
戴一帆 Dai Yifan ◽  
铁贵鹏 Tie Guipeng ◽  
关朝亮 Guan Chaoliang ◽  
宁 禹 Ning Yu ◽  
...  

2019 ◽  
Vol 632 ◽  
pp. A48 ◽  
Author(s):  
S. P. Bos ◽  
D. S. Doelman ◽  
J. Lozi ◽  
O. Guyon ◽  
C. U. Keller ◽  
...  

Context. One of the key limitations of the direct imaging of exoplanets at small angular separations are quasi-static speckles that originate from evolving non-common path aberrations (NCPA) in the optical train downstream of the instrument’s main wavefront sensor split-off. Aims. In this article we show that the vector-Apodizing Phase Plate (vAPP) coronagraph can be designed such that the coronagraphic point spread functions (PSFs) can act as wavefront sensors to measure and correct the (quasi-)static aberrations without dedicated wavefront sensing holograms or modulation by the deformable mirror. The absolute wavefront retrieval is performed with a non-linear algorithm. Methods. The focal-plane wavefront sensing (FPWFS) performance of the vAPP and the algorithm are evaluated via numerical simulations to test various photon and read noise levels, the sensitivity to the 100 lowest Zernike modes, and the maximum wavefront error (WFE) that can be accurately estimated in one iteration. We apply these methods to the vAPP within SCExAO, first with the internal source and subsequently on-sky. Results. In idealized simulations we show that for 107 photons the root mean square (rms) WFE can be reduced to ∼λ/1000, which is 1 nm rms in the context of the SCExAO system. We find that the maximum WFE that can be corrected in one iteration is ∼λ/8 rms or ∼200 nm rms (SCExAO). Furthermore, we demonstrate the SCExAO vAPP capabilities by measuring and controlling the 30 lowest Zernike modes with the internal source and on-sky. On-sky, we report a raw contrast improvement of a factor ∼2 between 2 and 4 λ/D after five iterations of closed-loop correction. When artificially introducing 150 nm rms WFE, the algorithm corrects it within five iterations of closed-loop operation. Conclusions. FPWFS with the vAPP coronagraphic PSFs is a powerful technique since it integrates coronagraphy and wavefront sensing, eliminating the need for additional probes and thus resulting in a 100% science duty cycle and maximum throughput for the target.


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