EUV local CDU healing performance and modeling capability towards 5nm node

International Conference on Extreme Ultraviolet Lithography 2017 ◽

10.1117/12.2281627 ◽

2017 ◽

Author(s):

Tae Kwon Jee ◽

Vadim Timoshkov ◽

David Rio ◽

Yu-Cheng Tsai ◽

Peter Choi ◽

...

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