Trajectory error analysis of a flexure pivot type guide for linear nanopositioning
Keyword(s):
1999 ◽
Vol 173
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pp. 185-188
Keyword(s):
1995 ◽
Vol 11
(1)
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pp. 21-28
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Keyword(s):
Keyword(s):
2019 ◽
Vol 139
(11)
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pp. 1241-1247