Scalable maskless patterning of nanostructures using high-speed scanning probe arrays

2017 ◽  
Author(s):  
Chen Chen ◽  
Zhidong Du ◽  
Liang Pan ◽  
Meghana Akella
Keyword(s):  
High Speed ◽  
Scanning Probe ◽  
Maskless Patterning

Быстродействующая атомно-силовая и сканирующая капиллярная микроскопия в решении задач материаловедения, биологии и медицины

2020 ◽  
Vol 13 (3-4) ◽  
pp. 222-228
Author(s):  
И.В. Яминский ◽  
А.И. Ахметова
Keyword(s):  
Antibiotic Resistance ◽  
Early Detection ◽  
Biomedical Research ◽  
Drug Screening ◽  
Targeted Delivery ◽  
High Speed ◽  
Scanning Probe ◽  
Biological Processes ◽  
Atomic Force ◽  
Probe Microscope

Разработка высокоэффективных режимов быстродействующего сканирующего зондового микроскопа, в первую очередь атомно-силовой и сканирующей капиллярной микроскопии, представляет особый интерес для успешного проведения биомедицинских исследований: изучения биологических процессов и морфологии биополимеров, определения антибио­тикорезистентности бактерий, адресной доставки биомакромолекул, скринингу лекарств, раннему обнаружению биологических агентов (вирусов и бактерий) и др. The development of highly efficient modes of a high-speed scanning probe microscope, primarily atomic force and scanning capillary microscopy, is of particular interest for successful biomedical research: studying biological processes and the morphology of biopolymers, determining antibiotic resistance of bacteria, targeted delivery of biomacromolecules, drug screening, early detection agents (viruses and bacteria), etc.

Development of High-Speed Actuator for Scanning Probe Microscopy

2010 ◽  
pp. 45-54 ◽  
Author(s):  
Yasuhiro Sugawara ◽  
Yan Jun Li ◽  
Yoshitaka Naitoh ◽  
Masami Kageshima
Keyword(s):  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Probe Microscopy

Fluorocarbon Resist for High-Speed Scanning Probe Lithography

2007 ◽  
Vol 46 (39) ◽  
pp. 7477-7480 ◽  
Author(s):  
Marco Rolandi ◽  
Itai Suez ◽  
Andreas Scholl ◽  
Jean M. J. Fréchet
Keyword(s):  
High Speed ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

1999 ◽  
Vol 123 (1) ◽  
pp. 35-43 ◽  
Author(s):  
D. Croft ◽  
G. Shed ◽  
S. Devasia
Keyword(s):  
High Precision ◽  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Optical Systems ◽  
Positioning Precision ◽  
Force Microscopy ◽  
Atomic Force ◽  
Vibration Compensation ◽  
Adverse Affects

This article studies ultra-high-precision positioning with piezoactuators and illustrates the results with an example Scanning Probe Microscopy (SPM) application. Loss of positioning precision in piezoactuators occurs (1) due to hysteresis during long range applications, (2) due to creep effects when positioning is needed over extended periods of time, and (3) due to induced vibrations during high-speed positioning. This loss in precision restricts the use of piezoactuators in high-speed positioning applications like SPM-based nanofabrication, and ultra-high-precision optical systems. An integrated inversion-based approach is presented in this article to compensate for all three adverse affects—creep, hysteresis, and vibrations. The method is applied to an Atomic Force Microscope (AFM) and experimental results are presented that demonstrate substantial improvements in positioning precision and operating speed.

A dual-stage nanopositioning approach to high-speed scanning probe microscopy

2012 ◽  
Author(s):  
Tomas Tuma ◽  
Walter Haeberle ◽  
Hugo Rothuizen ◽  
John Lygeros ◽  
Angeliki Pantazi ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Dual Stage

High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories

2012 ◽  
Vol 23 (18) ◽  
pp. 185501 ◽  
Author(s):  
Tomas Tuma ◽  
John Lygeros ◽  
V Kartik ◽  
Abu Sebastian ◽  
Angeliki Pantazi
Keyword(s):  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Probe Microscopy

Fabrication of Thin-Film Transistors Using PECVD-Grown Carbon Nanotubes and Their Application to Integrated Circuits

2012 ◽  
Vol 1451 ◽  
pp. 159-168
Author(s):  
Takashi Mizutani ◽  
Shigeru Kishimoto
Keyword(s):  
Integrated Circuits ◽  
Scanning Probe Microscopy ◽  
High Speed ◽  
Chemical Vapor ◽  
Ring Oscillator ◽  
Scanning Probe ◽  
Preferential Growth ◽  
Current Voltage ◽  
Current Voltage Characteristics

ABSTRACTMedium scale integrated circuits with 108 CNT-TFTs have been fabricated using CNTs grown by plasma enhanced chemical vapor deposition (PECVD) which has the advantage of preferential growth of CNTs with semiconducting behavior in the FET current–voltage characteristics. High-speed operation with a switching time of 0.51 μs/gate, which is highest in the CNT-TFT integrated circuits to our knowledge, was demonstrated by a 53-stage ring oscillator. Characterization of CNT-TFTs using scanning probe microscopy has also been performed. The island-like structure in the electrical properties of the CNT network was observed even in a high-density CNT network in the subthreshold regime. This was explained by the decrease of the effective number of CNTs which contribute the electrical conduction.

scholarly journals Response to “Comment on ‘MEMS-based high speed scanning probe microscopy’” [Rev. Sci. Instrum. 81, 117101 (2010)]

2010 ◽  
Vol 81 (11) ◽  
pp. 117102 ◽  
Author(s):  
E. C. M. Disseldorp ◽  
F. C. Tabak ◽  
A. J. Katan ◽  
M. B. S. Hesselberth ◽  
T. H. Oosterkamp ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Probe Microscopy
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