Combining three wavelength illumination and parallel phase shift interferometry for high-speed high-resolution and real-time motion tracking and 3D imaging (Conference Presentation)

Author(s):  
Michael Ney ◽  
Ibrahim Abdulhalim
Sensors ◽  
2019 ◽  
Vol 19 (2) ◽  
pp. 377
Author(s):  
Satoshi Tabata ◽  
Michika Maruyama ◽  
Yoshihiro Watanabe ◽  
Masatoshi Ishikawa

The existing phase-shift methods are effective in achieving high-speed, high-precision, high-resolution, real-time shape measurement of moving objects; however, a phase-unwrapping method that can handle the motion of target objects in a real environment and is robust against global illumination as well is yet to be established. Accordingly, a robust and highly accurate method for determining the absolute phase, using a minimum of three steps, is proposed in this study. In this proposed method, an order structure that rearranges the projection pattern for each period of the sine wave is introduced, so that solving the phase unwrapping problem comes down to calculating the pattern order. Using simulation experiments, it has been confirmed that the proposed method can be used in high-speed, high-precision, high-resolution, three-dimensional shape measurements even in situations with high-speed moving objects and presence of global illumination. In this study, an experimental measurement system was configured with a high-speed camera and projector, and real-time measurements were performed with a processing time of 1.05 ms and a throughput of 500 fps.


Author(s):  
Kenneth Krieg ◽  
Richard Qi ◽  
Douglas Thomson ◽  
Greg Bridges

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.


2008 ◽  
Vol 4 (4) ◽  
pp. 339-347 ◽  
Author(s):  
Xiaojun Chen ◽  
Yanping Lin ◽  
Yiqun Wu ◽  
Chengtao Wang

2019 ◽  
Vol 2019.25 (0) ◽  
pp. 18B09
Author(s):  
FENG Yuanrun ◽  
Hideaki TAKAHASHI ◽  
Kazuyuki KOJIMA ◽  
Hiroyuki SATO

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