Vibration isolation and damping in high precision equipment

2017 ◽  
Author(s):  
B. Bukkems ◽  
T. Ruijl ◽  
J. Simons
Keyword(s):  
High Precision ◽  
Vibration Isolation ◽  
Precision Equipment

A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables

2010 ◽  
Vol 34 (1) ◽  
pp. 43-48 ◽  
Author(s):  
Tomonori Kato ◽  
Kenji Kawashima ◽  
Tatsuya Funaki ◽  
Kotaro Tadano ◽  
Toshiharu Kagawa
Keyword(s):  
Active Control ◽  
High Precision ◽  
Vibration Isolation ◽  
Quick Response ◽  
Pressure Regulator ◽  
Response Pressure

Multi-objective optimization of composite two-stage vibration isolation system for sensitive equipment

2016 ◽  
Vol 14 (2) ◽  
pp. 343-361
Author(s):  
Wei Huang ◽  
Jian Xu ◽  
Dayong Zhu ◽  
Cheng Liu ◽  
Jianwei Lu ◽  
...  
Keyword(s):  
Thin Plate ◽  
Vibration Isolation ◽  
Composite System ◽  
Optimization Technique ◽  
Two Stage ◽  
Isolation System ◽  
Vibration Isolation System ◽  
Content Type ◽  
Multi Objective ◽  
Precision Equipment

Purpose The purpose of this paper is to propose a novel strategy of optimal parameters configuration and placement for sensitive equipment. Design/methodology/approach In this study, clamped thin plate is considered as the foundation form, and a novel composite system is proposed based on the two-stage isolation system. By means of the theory of mechanical four-pole connection, the displacement amplitude transmissibility from the thin plate to precision equipment is derived. For the purpose of performing optimal design of the composite system, a novel multi-objective idea is presented. Multi-objective particle swarm optimization (MOPSO) algorithm is adopted as an optimization technique, which can achieve a global optimal solution (gbest), and selecting the desired solution from an equivalent Pareto set can be avoided. Maximum and variance of the four transmitted peak displacements are considered as the fitness functions simultaneously; the purpose is aimed at reducing the amplitude of the multi-peak isolation system, meanwhile pursuing a uniform vibration as far as possible. The optimization is mainly organized as a combination of parameter configuration and placement design, and the traversal search of discrete plate is performed in each iteration for the purpose of achieving the global optimum. Findings An important transmissibility based on the mechanical four-pole connection is derived, and a composite vibration isolation system is proposed, and a novel optimization problem is also defined here. This study reports a novel optimization strategy combined with artificial intelligence for parameters and placement design of precision equipment, which can promote the traditional view of two-stage vibration isolation. Originality/value Two-stage vibration isolation systems are widely applied to the vibration attenuation of precision equipment, but in these traditional designs, vibration participation of foundation is often ignored. In this paper, participation of foundation of equipment is considered, and a coherent new strategy for equipment isolation and foundation vibration is presented. This study shows a new vision of interdisciplinary including civil engineering, mechanical dynamics and computational science.

scholarly journals Active vibration isolation of high precision machines

2010 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
C. Collette ◽  
S. Janssens ◽  
K. Artoos ◽  
C. Hauviller
Keyword(s):  
Active Control ◽  
High Precision ◽  
Vibration Isolation ◽  
Control Strategies ◽  
External Disturbances ◽  
Single Degree Of Freedom ◽  
Single Degree ◽  
Atomic Force ◽  
Active Vibration ◽  
Precision Machines

This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.

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