Structural influence of a spatial light modulator on generated wavefronts for speckle-based shape measurement

2017 ◽  
Author(s):  
Félix Salazar-Bloise ◽  
Min Lu ◽  
Shengjia Wang ◽  
Alexander W. Koch ◽  
Laura M. Aulbach
Keyword(s):  
Spatial Light Modulator ◽  
Shape Measurement ◽  
Light Modulator ◽  
Structural Influence

Shape Measurement by Means of Phase Retrieval using a Spatial Light Modulator

2010 ◽  
Author(s):  
Mostafa Agour ◽  
Philipp Huke ◽  
Christoph v. Kopylow ◽  
Claas Falldorf ◽  
Pramod K. Rastogi ◽  
...  
Keyword(s):  
Spatial Light Modulator ◽  
Phase Retrieval ◽  
Shape Measurement ◽  
Light Modulator

A high-end mask writer using a spatial light modulator

2005 ◽  
Author(s):  
Ulric B. Ljungblad ◽  
Per Askebjer ◽  
Tord Karlin ◽  
Tor Sandstrom ◽  
Henrik Sjoeberg
Keyword(s):  
Spatial Light Modulator ◽  
Light Modulator
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