Free-electron laser emission architecture impact on EUV lithography

2017 ◽  
Author(s):  
Erik R. Hosler ◽  
Obert R. Wood ◽  
William A. Barletta
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Laser Emission ◽  
Euv Lithography

Characterization of metal resist for EUV lithography using Infrared free electron laser

2018 ◽  
Author(s):  
Minoru Toriumi ◽  
Takayasu Kawasaki ◽  
Takayuki Imai ◽  
Koichi Tsukiyama ◽  
Julius Joseph S. Santillan ◽  
...  
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Euv Lithography

FAR INFRARED FREE ELECTRON LASER

1983 ◽  
Vol 44 (C1) ◽  
pp. C1-385-C1-385
Author(s):  
E. D. Shaw ◽  
R. M. Emanuelson ◽  
G. A. Herbster
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Far Infrared

FULLY QUANTIZED MANY PARTICLE THEORY OF A FREE-ELECTRON LASER

1983 ◽  
Vol 44 (C1) ◽  
pp. C1-367-C1-367
Author(s):  
W. Becker ◽  
J. K. McIver
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Particle Theory

Effect of Chirality by the Free Electron Laser Irradiation

2010 ◽  
Vol 130 (2) ◽  
pp. 209-212 ◽  
Author(s):  
Daisuke Ishizuka ◽  
Keijiro Sakai ◽  
Nobuyuki Iwata ◽  
Hirofumi Yajima ◽  
Hiroshi Yamamoto
Keyword(s):  
Laser Irradiation ◽  
Free Electron ◽  
Free Electron Laser

X-Ray Free Electron Laser Facility for Next Generation of Scientific Exploration and Discovery

2011 ◽  
Vol 131 (2) ◽  
pp. 68-71
Author(s):  
Etsuo FUJIWARA ◽  
Eiichi ANAYAMA ◽  
Yuichiro KATSUTA ◽  
Toshiki IZUTANI ◽  
Daichi OKUHARA ◽  
...  
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Next Generation ◽  
X Ray ◽  
Scientific Exploration ◽  
Laser Facility

X-ray Free Electron Laser SACLA

2014 ◽  
Vol 134 (12) ◽  
pp. 836-839
Author(s):  
Junichi INOUE ◽  
Yuji TANAKA ◽  
Yuki MATSUMOTO ◽  
Kensuke KANDA
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
X Ray
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