In-situ measurement of outgassing generated from EUV resist including metal oxide nanoparticles during electron irradiation
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2017 ◽
Vol 30
(1)
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pp. 109-112
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2018 ◽
Vol 31
(2)
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pp. 257-260
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2019 ◽
Vol 19
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pp. 1441-1445
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2017 ◽
Vol 42
(41)
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pp. 25951-25959
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2009 ◽
Vol 122
(1-3)
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pp. 79-86
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2020 ◽
Vol 3
(7)
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pp. 7172-7181
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