Free energy modeling of block-copolymer within pillar confinements on DSA lithography
2015 ◽
Vol 2
(7)
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pp. 075301
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2002 ◽
Vol 13
(5)
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pp. 479-496
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Keyword(s):
2017 ◽
Vol 16
(04)
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pp. 1
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2019 ◽
Vol 4
(1)
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pp. 175-185
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Keyword(s):
2012 ◽
Vol 52
(3)
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pp. 804-813
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Keyword(s):