3D-profile measurement of advanced semiconductor features by using FIB as reference metrology

2017 ◽  
Author(s):  
Kiyoshi Takamasu ◽  
Yuuki Iwaki ◽  
Satoru Takahashi ◽  
Hiroki Kawada ◽  
Masami Ikota
Keyword(s):  
Profile Measurement ◽  
3D Profile

A weighted fusion method with multi-system for improving measurement accuracy of structured light 3D profilometry

2021 ◽  
Author(s):  
Chao Xing ◽  
Junhui Huang ◽  
Zhao Wang ◽  
Jianmin Gao
Keyword(s):  
Measurement Errors ◽  
Measurement Accuracy ◽  
Structured Light ◽  
Profile Measurement ◽  
Complex Surfaces ◽  
3D Profilometry ◽  
Weighted Fusion ◽  
Multiple Measurements ◽  
Geometric Relationship ◽  
3D Profile

Abstract It is a challenge to improve the accuracy of 3D profile measurement based on binary coded structured light for complex surfaces. A new method of weighted fusion with multi-system is presented to reduce the measurement errors due to the stripe grayscale asymmetry, which is based on the analysis of stripe center deviation related to surface normal and the directions of incident and reflected rays. First, the stripe center deviation model is established according to the geometric relationship between the stripe center deviation, the incident and reflected angles at any measured point. The influence of each variable on stripe center deviation is analyzed, and three subsystems are formed by a binocular structured light framework to achieve multiple measurements based on the influence regularity. Then in order to improve the measurement accuracy, different weights are assigned to the measured point in different subsystems according to the stripe center deviation model and its relationship with measurement error, and the weighted data from different subsystems are fused. Experiments are carried out to validate the presented method, and the experimental results demonstrate that it effectively improves the measurement accuracy of complex surfaces and measurement accuracy is improved by about 27% compared with the conventional method.

An absolute phase technique for 3D profile measurement using four-step structured light pattern

2012 ◽  
Vol 50 (9) ◽  
pp. 1274-1280 ◽  
Author(s):  
Jing Xu ◽  
Shaoli Liu ◽  
An Wan ◽  
Bingtuan Gao ◽  
Qiang Yi ◽  
...  
Keyword(s):  
Structured Light ◽  
Profile Measurement ◽  
Light Pattern ◽  
Absolute Phase ◽  
3D Profile

3D Profile measurement using a multi-gray scale compared with reference projections

Measurement ◽  
1997 ◽  
Vol 20 (2) ◽  
pp. 129-134 ◽  
Author(s):  
R. Furutani ◽  
H. Asano ◽  
K. Takamasu ◽  
S. Ozono
Keyword(s):  
Profile Measurement ◽  
Gray Scale ◽  
3D Profile

scholarly journals Intensity ratio approach for 3D profile measurement based on projection of triangular patterns

2014 ◽  
Vol 53 (2) ◽  
pp. 200 ◽  
Author(s):  
Zongkai Yang ◽  
Ke Wu ◽  
Jiangtao Xi ◽  
Yanguang Yu
Keyword(s):  
Intensity Ratio ◽  
Profile Measurement ◽  
Ratio Approach ◽  
3D Profile

Robust phase unwrapping algorithm for 3D profile measurement applications

2017 ◽  
Author(s):  
Meiqi Fang ◽  
Changquan Zhou ◽  
Chunwei Zhang ◽  
Hong Zhao ◽  
Yueyang Ma
Keyword(s):  
Phase Unwrapping ◽  
Profile Measurement ◽  
3D Profile
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